[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-3] A Study on Multi-layer Metal MEMS Accelerometer with Differential Sensing Structure

〇Daisuke Yamane^1,4, Toshifumi Konishi², Teruaki Safu², Hiroyuki Ito^1,4, Shiro Dosho^1,4, Noboru Ishihara^1,4, Masato Sone^1,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

Keywords:MEMS, accelerometer, differential sensing structure