[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-4] Fabrication of MEMS Sensors for Detecting Specific Sonic Wave in Applying to Experimental Rodent Models

〇Shuichi Murakami¹, Ryo Iwaki², Kazuo Satoh¹, Tsunehisa Tanaka¹, Mayumi Uno¹, Takashi Tateno² (1.TRI-Osaka, 2.Graduate School of Sci. and Tech., Hokkaido Univ.)

Keywords:MEMS, acoustic sensor, PVDF

As a frontend device for the auditory prostheses in animal brain experiments, we have developed piezoelectric sensor system whose sensitivity covers ultrasonic frequencies. In this study, we fabricated and evaluated MEMS acoustic sensors which realize high response sensitivity and high selectivity with a narrow frequency-response range in each channel with a low power consumption.