Development of after-arc plasma type apparatus for irradiation of electronegative oxygen atoms with dc arc discharge

Hisashi Kitami; Toshiyuki Sakemi; Junichi Nomoto; Hisao Makino; Yasushi Aoki; Tetsuya Yamamoto

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-A22-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Sep 15, 2016 9:00 AM - 12:00 PM A22 (Main Hall B)

Tomoki Abe(Tottori Univ.)

9:30 AM - 9:45 AM

△ [15a-A22-3] Development of after-arc plasma type apparatus for irradiation of electronegative oxygen atoms with dc arc discharge

〇Hisashi Kitami^1,2, Toshiyuki Sakemi¹, Junichi Nomoto², Hisao Makino^2,3, Yasushi Aoki¹, Tetsuya Yamamoto² (1.Sumitomo Heavy Industries, Ltd., 2.Research Inst., Kochi Univ. Tech., 3.Kochi Univ. Tech.)

Keywords:electronegative oxygen atoms, irradiation of electronegative oxygen atoms, plasma diagnostics