[15a-A24-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [15a-A24-7] Effect of the cooling process of thermal annealing on the oxygen precipitation in single-crystalline silicon for solar cells

〇Ryohei Nakayama^1,2, Atsushi Ogura¹, Haruhiko Ono^2,1 (1.Meiji Univ., 2.Kanagawa Ind. Tech. Center)

Keywords:the oxygen precipitation, solar cells, thermal annealing