[15a-A26-1~11] 6.2 Carbon-based thin films

[15a-A26-9] Improvement of corrosion resistance of amorphous carbon film by addition of silicon

〇Jumpei Nishikawa¹, Masayuki Nakano², Junko Hieda³, Naoto Ohtake¹, Hiroki Akasaka¹ (1.Tokyo Inst. of Tech., 2.Tokyo Natl. College of Tech., 3.Nagoya Univ.)

Keywords:amorphous carbon film, corrosion, surface plasmon resonance

Hydrogenated amorphous carbon film (a-C:H) is one of the functional films which consists of sp² and sp³ hybridized carbon and hydrogen atoms. Typical properties of the films are high hardness and low friction coefficient, and it is also known that they have high corrosion resistance against acids and alkalis such as sulfuric acid, hydrofluoric acid and ammoniu hydroxide. On the other hand, since graphite is corroded by some strong acids such as nitric acid and a-C:H contains sp² bonding carbon same as graphite, a-C:H is corroded by nitric acid. The film properties strongly depend on the film structure and doping of other elements into the films can also change the film properties. In this study, the effect of silicon (Si) doping on the corrosion resistance of a-C:H films was investigated by the precise corrosion rate measurement method.