[15a-B2-1~8] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[15a-B2-2] Water Nozzle Design for Batch-type Silicon Wafer Wet Cleaning Bath

〇shogo okuyama¹, Kento Miyazaki¹, Nobutaka Ono¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)

Keywords:Wet cleaning bath, Water injection nozzle, Water flow design

The water injection nozzle for the silicon wafer wet cleaning bath was designed, in order to achieve the water velosity distribution along the nozzle. The water nozzle in which the simple-designed inner tube was designed by the numerical calculation and verifid by the water flow visualization.