[15a-B5-1~12] 12.1 Fabrications and Structure Controls

[15a-B5-1] Effect of geometrical shape of nozzle tip on electrospray deposition of organic thin film

〇Hiroyuki Ueda¹, Keita Takeuchi¹, Akihiko Kikuchi^1,2 (1.Sophia Univ., 2.Sophia Nanotech Center)

Keywords:Low-molecular organic material, wet process, electrospray

Electrospray deposition (ESD) is an attractive candidate for solution-based wet process of organic semiconductor thin film fabrication. We reported that by using MJ mode which has two or more liquid thread, it can form much smoother (RMS < 2.5 nm) and uniform organic thin film. However, MJ mode has a problem of instability due to a difficulty to fix the position of multiple liquid threads spouted at cylindrical metal nozzle tip.
In this study, we investigated the effect of geometrical shape of a cylindrical metal nozzle tip on the spraying characteristics of organic solution by ESD. By forming multiple protrusions at the nozzle tip, we attempted to concentrate the electric field and to fix position of liquid threads for spraying smaller droplets and stabilizing the MJ mode.