The 77th JSAP Autumn Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[15a-B7-1~14] 8.1 Plasma production and control

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B7 (Exhibition Hall)

Tatsuya Misawa(Saga Univ.), Tatsuo Ishijima(Kanazawa Univ.)

10:00 AM - 10:15 AM

△ [15a-B7-5] Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier Ⅲ

〇(M2)Yuichi Hasegawa1, Daisuke Ogawa1, Keiji Nakamura1, Soonam Park2, Satoru Kobayashi2, Hideo Sugai3 (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

Keywords:Cylindrical Cavity, Microwave Plasma, Solid-State