Yuichi Hasegawa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[15a-B7-1~14] 8.1 Plasma production and control

10:00 AM - 10:15 AM

△ [15a-B7-5] Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier Ⅲ

〇(M2)Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Soonam Park², Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)