The 77th JSAP Autumn Meeting, 2016

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Poster presentation

3 Optics and Photonics » 3.7 Laser processing

[15a-P3-1~13] 3.7 Laser processing

Thu. Sep 15, 2016 9:30 AM - 11:30 AM P3 (Exhibition Hall)

9:30 AM - 11:30 AM

[15a-P3-3] Microfabrication of through holes in PDMS sheets using laser plasma EUV light

〇Hikari Urai1, Mizuki Ogawa1, Shintaro Fukami1, Tetsuya Makimura1, Hiroyuki Niino2 (1.Univ. of Tsukuba, 2.AIST)

Keywords:microfabrication, polydimethylsiloxane