Hikari Urai

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:30 AM - 11:30 AM P3 (Exhibition Hall)

Poster presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[15a-P3-1~13] 3.7 Laser processing

9:30 AM - 11:30 AM

[15a-P3-3] Microfabrication of through holes in PDMS sheets using laser plasma EUV light

〇Hikari Urai¹, Mizuki Ogawa¹, Shintaro Fukami¹, Tetsuya Makimura¹, Hiroyuki Niino² (1.Univ. of Tsukuba, 2.AIST)