[15a-P3-1~13] 3.7 Laser processing

[15a-P3-4] Synthesis of ZnO Microdot Arrays by Laser Interference Patterning with Nanosecond Pulses

〇Daisuke Nakamura¹, Shuhei Takao¹, Mituhiro Higashihata¹, Hiroshi Ikenoue¹, Tatsuo Okada¹ (1.Kyushu Univ.)

Keywords:ZnO, Laser interference patterening, Microdot

We have succeeded in fabricating periodic ZnO microdot arrays by four-beam interference patterning in air at room temperature. In this contribution, we report the selective micropatterning of a ZnO film by interference laser processing and UV lasing from ZnO submicron droplet under pulsed laser excitation.