[15a-P9-1~20] 9.2 Nanowires and Nanoparticles

[15a-P9-16] High-speed production of silicon nanoparticles by plasma jet CVD

〇Yusuke Nagai¹, Hirohito Hosokawa¹, Satoshi Nishida¹, Masaharu Komiyama¹, Shizuma Kuribayashi¹ (1.Gifu Univ.)

Keywords:nanoparticles

In our laboratory by applying a plasma jet CVD method, the silicon nano-particles have been successful to high-speed manufacture of 500mg / hr at this stage. However it is not reached yet to grain diameter control, while maintaining high productivity in this study,so we intended that a particle size control of nanoparticles. In this study we investigated the changes in particle size and deposition amount when changing the input power and the silane flow rate, we report revealed these relationships.