4:30 PM - 4:45 PM
[15p-A23-13] Measurement of Low Carbon Concentration in Silicon Substrate Using Deep Level Transient Spectroscopy Method.
Keywords:DLTS, Silicon Substrate, Carbon Contamination
Presentation information
Oral presentation
15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
[15p-A23-1~20] 15.8 Crystal evaluation, impurities and crystal defects
Thu. Sep 15, 2016 1:15 PM - 6:45 PM A23 (201B)
Takahiro Maeta(Global Wafers Japan), Takuto Kojima(Meiji Univ.), Yutaka Ohno(Tohoku Univ.)