The 77th JSAP Autumn Meeting, 2016

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[15p-A23-1~20] 15.8 Crystal evaluation, impurities and crystal defects

Thu. Sep 15, 2016 1:15 PM - 6:45 PM A23 (201B)

Takahiro Maeta(Global Wafers Japan), Takuto Kojima(Meiji Univ.), Yutaka Ohno(Tohoku Univ.)

5:45 PM - 6:00 PM

[15p-A23-17] Analysis of Oxygen Precipitation by Highly Parallel X-ray Diffuse Scattering

〇Tomoyuki Horikawa1, Takeshi Senda1, Junji Matsui2, Yoshiyuki Tsusaka2 (1.GlobalWafers Japan Co., Ltd., 2.University of Hyogo)

Keywords:silicon wafer, oxygen precipitation, diffuse scattering