[15p-A25-1~17] 17.1 Carbon nanotubes & other nanocarbon materials

[15p-A25-2] SWNT growth from Ru catalyst by alcohol gas source method

〇Takayuki Fujii¹, Akinari Kozawa¹, Takahiro Saida¹, Takihiro Maruyama¹, Shigeya Naritsuka¹ (1.Meijo Univ)

Keywords:SWNT, Ru, chemical vapor deposition method

SWNTs have various excellent electrical characteristics for applications to electronics. So far, we have conducted SWNT growth using the Pt as catalysts. However, Pt is expensive. Therefore, we focused on ruthenium.In this study, we carried out single-walled carbon nanotube (SWNT) growth on Al₂O_x/SiO₂/Si substrates using Ru as catalysts by chemical vapor deposition (CVD) method. We succeeded in SWNT growth at 500 ℃. Our results showed that Ru has high activity as catalysts in SWNT growth and Ru catalyst has potential for low temperature SWNT growth.