[15p-A41-1~17] 12.5 Organic solar cells

[15p-A41-14] A design of the combinatorial molecular layer deposition system for high-throughput screening of organic-inorganic hybrid materials

〇Kazuhiro Kawashima¹, Yuji Okamoto², Yoshikazu Suzuki², Kenji Itaka³, Nobuyuki Matsuki⁴, Masatomo Sumiya⁵, Haruo Nagasawa¹, Toshihiro Sato¹, Setsu Suzuki¹, Hideomi Koinuma^1,2,5 (1.COMET Inc., 2.Univ. Tsukuba, 3.Hirosaki Univ., 4.Kanagawa Univ., 5.NIMS)

Keywords:Organic-inorganic hybrid material, Perovskite solar cell, Si /perovskite tandem cell

An infrared laser deposition system for the organic-inorganic perovskite CH₃NH₃PbI₃ was constructed. The deposition rate is regulated by PID control according to the feedback from the film thickness meter, and the stabilized deposition rate was achieved. The stable control of the deposition rate is an important factor from the viewpoint of the combinatorial technology, reproducibility of the deposition, and then Si/perovskite tandem structure.