5:00 PM - 5:15 PM
[15p-A41-14] A design of the combinatorial molecular layer deposition system for high-throughput screening of organic-inorganic hybrid materials
Keywords:Organic-inorganic hybrid material, Perovskite solar cell, Si /perovskite tandem cell
An infrared laser deposition system for the organic-inorganic perovskite CH3NH3PbI3 was constructed. The deposition rate is regulated by PID control according to the feedback from the film thickness meter, and the stabilized deposition rate was achieved. The stable control of the deposition rate is an important factor from the viewpoint of the combinatorial technology, reproducibility of the deposition, and then Si/perovskite tandem structure.