[15p-B10-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

△ [15p-B10-4] Space-selective doping of magnetic particles into multi-photon polymerized 3D

〇Katsuhiro Suzuki¹, Hiroaki Nishiyama¹ (1.Gad. Yamagata Univ.)

Keywords:femtosecond laser, multi-photon polymerization, 3D structures

We report a novel doping approach of magnetic microparticles into multi-photon polymerized 3D structures and its application to the fabrication of magnetically controllable 3D actuators. Although fs laser multi-photon polymerization is a useful way for 3D structuring, it is difficult to obtain structures with hybrid materials. We successfully introduce magnetic particles into specific regions of the structures using adhesion forces.