Design and fabrication of MEMS Fabry-Perot interferometric surface-stress sensor with high wavelength selectivity

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Thu. Sep 15, 2016 1:45 PM - 6:30 PM B10 (Exhibition Hall)

Minoru Sasaki(Toyota Tech. Inst.)

3:30 PM - 3:45 PM

〇(M1)Toshiaki Takahashi¹, Yoshihiro Masuya¹, Hayato Ishida¹, Takeshi Hizawa¹, Kazuhiro Takahashi¹ (1.Toyohashi Tech.)

Keywords:Fabry-Perot interferometer, surface stress, protein