The 77th JSAP Autumn Meeting, 2016

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[15p-B3-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Thu. Sep 15, 2016 1:45 PM - 4:45 PM B3 (Exhibition Hall)

Haruhiko Udono(Ibaraki Univ.), Yoshikazu Terai(Kyushu Inst. of Tech.)

1:45 PM - 2:00 PM

[15p-B3-1] Cross-sectional Analysis of BaSi2/SUS304 Deposited by Vacuum Evaporation

〇Takamichi Suhara1, Kenta Aoyagi1, Kosuke O. Hara2, Takashi Suemasu3, Noritaka Usami1 (1.Nagoya Univ., 2.Univ. of Yamanashi, 3.Univ. of Tsukuba)

Keywords:barium disilicide, vacuum evaporation, interface analysis