[15p-B5-1~19] 7.2 Applications and technologies of electron beams

[15p-B5-12] Long time operation of volcano-structured Ni Spindt-type field emitter array

〇Masayoshi Nagao¹, Yasuhito Gotoh², Hidenori Mimura³, Yoichiro Neo³, Sommawan Khumpuang^1,4, Shiro Hara^1,4 (1.AIST, 2.Kyoto Univ., 3.Shizuoka Univ., 4.Minimal)

Keywords:field emitter array, Minimal Fab, stability

We are developing volcano-structured Spindt-type field emitter arrays for radiation tolerant image sensor. The volcano-structured gate and focusing electrode is suitable for focusing electron beam from the emitter. We have chosen Ni as an emitter material for making volcano-structured FEA because of its easiness of the fabrication. However, there have been only a few reports about the emission characteristics of the Ni FEA. In this paper, we will report on the long time operation and the stability of the Ni FEA.