Masayoshi Nagao

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 6:45 PM B5 (Exhibition Hall)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[15p-B5-1~19] 7.2 Applications and technologies of electron beams

4:15 PM - 4:30 PM

[15p-B5-11] Fabrication of Spindt-type Field Emitter Arrays by Minimal Lithography System

〇Masayoshi Nagao¹, Noriyuki Tatsumi¹, Katsuhisa Murakami¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2, Yasuhito Gotoh³ (1.AIST, 2.Minimal, 3.Kyoto Univ.)

4:30 PM - 4:45 PM

[15p-B5-12] Long time operation of volcano-structured Ni Spindt-type field emitter array

〇Masayoshi Nagao¹, Yasuhito Gotoh², Hidenori Mimura³, Yoichiro Neo³, Sommawan Khumpuang^1,4, Shiro Hara^1,4 (1.AIST, 2.Kyoto Univ., 3.Shizuoka Univ., 4.Minimal)

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