The 77th JSAP Autumn Meeting, 2016

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Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[15p-B5-1~19] 7.2 Applications and technologies of electron beams

Thu. Sep 15, 2016 1:15 PM - 6:45 PM B5 (Exhibition Hall)

Yoichiro Neo(Shizuoka Univ.), Tadahiro Kawasaki(JFCC), Kazuo Yamamoto(JFCC)

2:30 PM - 2:45 PM

[15p-B5-5] Observation of Insulators using Fountain Detector

〇Takashi Sekiguchi1,2, Toshihide Agemura2, Kimura Takashi1, Hideo Iwai1 (1.NIMS, 2.Univ. Tsukuba)

Keywords:fountain detector, secondary electron, insulator

We have developed low-pass secondary electron detector (LPSED) for outlens SEM and named “Fountain Detector (FD)”. It is well known that the insulators are observed bright in secondary electron images. We have used FD to observe SiAlON powders as typical insulators and will report the characteristics of SE images of insulators.