[15p-B5-1~19] 7.2 Applications and technologies of electron beams

[15p-B5-7] STEM phase imaging technique by using quasi-Bessel beam and annularly arrayed pixel detector

〇Tadahiro Kawasaki^1,2,3, Takafumi Ishida^2,3, Tetsuji Kodama⁴, Takaomi Matsutani⁵, Takayoshi Tanji^2,3, Takashi Ikuta⁶ (1.JFCC, 2.IMaSS, Nagoya Univ., 3.GREEN, 4.Meijo Univ., 5.Kinki Univ., 6.OECU)

Keywords:scanning transmission electron microscopy, phase image, Bessel beam

Recent advances in STEM detectors have reached to the pixel array detectors (PADs) enabling to obtain whole information in reciprocal space during probe scanning. We have proposed the novel STEM phase retrieval technique using annularly-shaped pixel array detector (A-PAD) combined with quasi-Bessel beam. In this paper, we demonstrate applicability of our method called Phase Retrieval for Thick Specimens (PRETS).