[15p-B9-1~17] 13.3 Insulator technology

[15p-B9-5] Deposition conditions study of (Ba, Sr)TiO₃ by Liquid Phase Deposition method

〇(M2)Shunsaku Kunimitsu¹, Nobuo Haneji¹ (1.YNU)

Keywords:LPD, dielectric thin film, barium strontium titanate

The deposition of dielectric materials using liquid phase deposition (LPD) method have been investigated, for high-speed memory using a high dielectric material such as a DRAM or FeRAM. We did LPD methods of (Ba, Sr) TiO₃ which is a material that dielectric characteristics are changed by the content ratio of Ba and Sr, in reference the deposition conditions of the basic constructs SrTiO₃. As a result, thin films which have very small residual polarization is obtained, and change the hysteresis loop of a thin film by the difference in the solution concentration has occurred.