The 77th JSAP Autumn Meeting, 2016

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Oral presentation

11 Superconductivity » 11.5 Junction and circuit fabrication process, digital applications

[15p-D61-1~14] 11.5 Junction and circuit fabrication process, digital applications

Thu. Sep 15, 2016 1:15 PM - 5:00 PM D61 (Bandaijima Bldg.)

Mutsuo Hidaka(AIST)

1:45 PM - 2:00 PM

[15p-D61-3] Yield Improvement of Nb 9-layer Advanced Process using PECVD SiO2 insulator

〇Shuichi Nagasawa1, Mutsuo Hidaka1 (1.AIST)

Keywords:superconductor, fabrication process, PECVD

We have developed Nb 9-layer advanced process (ADP2) using PECVD SiO2 insulator, and evaluated the operating yield of the shift registers fabricated by the ADP2. By introducing the PECVD SiO2 insulator, we could obtain good yields even for large scale SFQ shift registers having Josephson junctions of more than 10, 000.