Effects of HfO<sub>x</sub> formation method on electrical characteristics of NbTiN junctions

Presentation information

Oral presentation

11 Superconductivity » 11.5 Junction and circuit fabrication process, digital applications

Thu. Sep 15, 2016 1:15 PM - 5:00 PM D61 (Bandaijima Bldg.)

2:00 PM - 2:15 PM

〇Kentaro Munemoto¹, Yoshito Sakakibara¹, Masamitsu Tanaka¹, Hiroyuki Akaike¹, Akira Fujimaki¹ (1.Nagoya Univ.)

Keywords:NbTiN