[15p-P11-1~12] 15.5 Group IV crystals and alloys

[15p-P11-10] Evaluation of Strained-Si formed by low-temperature Sputter Epitaxy Method

〇Kyohei Degura¹, Akira Motohashi¹, Katsumi Okubo¹, Nobumitsu Hirose², Akifumi Kasamatsu², Takashi Mimura², Toshiaki Matsui², Takahiro Tsukamoto¹, Yoshiyuki Suda¹ (1.Tokyo Univ. of Agric. & Technol., 2.National Inst. of Information and Communications Technol.)

Keywords:semiconductor