[15p-P13-1~17] 16.3 Bulk, thin-film and other silicon-based solar cells

▲ [15p-P13-10] Optimization of a-Si (i) Passivation Layer Fabricated by Facing Target Sputtering (FTS) Method

〇Akira Faris¹, Kazuyoshi Nakada¹, Shinsuke Miyajima¹ (1.Dept. of Electrical and Electronic Eng.)

Keywords:Silicon Solar Cells, Passivation, Sputtering