[15p-P18-1~3] Joint Session M "Phonon Engineering"（Poster）

[15p-P18-2] Fabrication and Characterization of Ni-Silicided Silicon Nanowire Thermoelectric Devices

〇Shuhei Asada¹, Shuichiro Hashimoto¹, Taiyu Xu¹, Shunsuke Oba¹, Takashi Matsukawa², Takanobu Watanabe¹ (1.Waseda Univ., 2.AIST)

Keywords:Thermoelectric, Nanowire, Silicon

We fabricated and evaluated Ni-silicided Si nanowire thermoelectric devices(TED), which are suppressed the series resistance by using the silicide control technology of Si nanowire structure. As a result, the thermoelectric power of TEDs are small, but we obtained the interesting results indicating that the thermoelectric performance is improved with the scaling down.