The 77th JSAP Autumn Meeting, 2016

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-P2-1~15] 6.2 Carbon-based thin films

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P2 (Exhibition Hall)

1:30 PM - 3:30 PM

[15p-P2-1] Characterization of Si-doped DLC thin films prepared by thermal decomposition method

〇Renpei Nakayama1, Yuma Murata1, Hiroshi Ono1, Katsumi Tanaka1 (1.UEC)

Keywords:Diamond-like Carbon, Si-dope, X-ray Photoelectron Spectroscopy