The 77th JSAP Autumn Meeting, 2016

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-P2-1~15] 6.2 Carbon-based thin films

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P2 (Exhibition Hall)

1:30 PM - 3:30 PM

[15p-P2-2] Fabrication and structural analysis of a-CNx:H films with high nitrogen contents by RF plasma CVD

〇Yoshiki Iizawa1, Kenya Hiramatsu1, Hidetoshi Saitoh1, Haruhiko Ito1 (1.Nagaoka Univ. of Tech.)

Keywords:Amorphous carbon nitride