[15p-P2-1~15] 6.2 Carbon-based thin films

[15p-P2-10] High-rate anisotropic diamond (100) etching using carbon solid solution reaction

〇(M1)Masatsugu Nagai¹, Tsubasa Matsumoto¹, Norio Tokuda¹, Takao Inokuma¹ (1.Grad. School of Natural Sci. & Technol., Kanazawa Univ.)

Keywords:diamond, etching, power device