The 77th JSAP Autumn Meeting, 2016

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-P2-1~15] 6.2 Carbon-based thin films

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P2 (Exhibition Hall)

1:30 PM - 3:30 PM

[15p-P2-10] High-rate anisotropic diamond (100) etching using carbon solid solution reaction

〇(M1)Masatsugu Nagai1, Tsubasa Matsumoto1, Norio Tokuda1, Takao Inokuma1 (1.Grad. School of Natural Sci. & Technol., Kanazawa Univ.)

Keywords:diamond, etching, power device