[15p-P2-1~15] 6.2 Carbon-based thin films

[15p-P2-11] EBIC current analysis on diamond Schottky barrier diode under reverse bias conditions

〇Hitoshi Umezawa^1,2,3, Khaled Driche^2,3,4, Hiroki Gima⁵, Yukako Kato¹, Tsuyoshi Yoshitake⁵, Etienne Gheeraert^2,3,4, Yoshiaki Mokuno¹ (1.AIST, 2.Inst Neel, 3.Univ. Grenoble Alpes, 4.Tsukuba Univ., 5.Kyushu Univ.)

Keywords:diamond, EBIC, impact ionization coefficient