[15p-P2-1~15] 6.2 Carbon-based thin films

[15p-P2-13] High-rate homoepitaxial growth of heavily boron-doped diamond (100) films by spherical cavity MPCVD

〇(M1)Takahiro Yamamoto¹, Daiki Kaneta¹, Tsubasa Matsumoto¹, Osamu Ariyada³, Masahiko Ogura², Hiromitsu Kato², Satoshi Yamasaki², Norio Tokuda¹, Takao Inokuma¹ (1.Grad. School of Natural Sci. & Tech. of Kanazawa Univ., 2.Arios Inc., 3.AIST)

Keywords:diamond, 100, boron