[15p-P2-1~15] 6.2 Carbon-based thin films

[15p-P2-4] Photoinduced Deformation of Amorphous Carbon Nitride Thin Films Deposited on Polymer Films

〇Tomo Harata¹, Masami Aono¹, Dai Orihara¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (1.NDA)

Keywords:photoinduced deformation, carbon nitride, polymer film