[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

[15p-P6-1] Sputter-deposition of NdFeB/Ta magnetic thin films using Sputtering

Kota Kodama¹, Tomohiro Himaki¹, Masanori Shinohara¹, 〇Yoshinobu Matsuda¹ (1.Nagasaki Univ.)

Keywords:NdFeB, magnetic energy density, coercivity

For the purpose of realizing permanent magnet property with an irreversible thermal demagnetization factor of less than 5% at 150 degree Celsius, we have prepared Nd₂Fe₁₄B/Ta single layer thin films and evaluated their crystalline and magnetic properties by using X-ray diffraction and vibrating sample magnetometer. The film prepared with 600 nm NdFeB and 40 nm Ta showed a good hard magnetic properties such as high (BH)max (magnetic energy density) of more than 80kJ/m³ and high coercivity of about 960kA/m.