Development of high-speed jet pulsed plasma source for surface treatment

Presentation information

Poster presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P6 (Exhibition Hall)

1:30 PM - 3:30 PM

〇Daisuke Ogasawara¹, Hiroaki Kawano¹, Ken Kakegawa¹, Hidekazu Miyahara¹, Akitoshi Okino¹ (1.Tokyo Tech FIRST)

Keywords:atmospheric plasma, surface treatment