[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

[15p-P6-7] Evaluation of Oxygen Negative Ion Flux in ITO Magnetron Sputtering

〇Taku Suyama¹, Bae Hansin¹, Setaka Kenta¹, Kensuke Sasai¹, Haruka Suzuki¹, HIrotaka Toyoda^1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ.)

Keywords:Plasma, Sputter