[16a-A32-1~9] 17.3 Layered materials

△ [16a-A32-8] Effect of mild plasma treatment for fabrication of high performance optoelectrical device with few-layered suspended transition metal dichalcogenide

〇(M2)Reito Nagai¹, Toshiro Kaneko¹, Toshiaki Kato¹ (1.Dept. of Electronic Eng., Tohoku Univ.)

Keywords:2D material, Mild plasma

Transition meal dichalcogenide (TMD) attracts intense attention as a brand new semiconducting material. Systematic investigations were carried out on purpose to improve electrical property of suspended TMD by mild oxygen plasma functionalization. Based on these studies, we have succeeded in improving conductivity and photoresponsivity of suspended TMD by mild oxygen plasma treatment. It became clear that the improvement of optoelectrical properties of suspended TMD is the effect of reactive chemical species generated from mild oxygen plasma.