[16a-A33-1~9] 17.2 Graphene

△ [16a-A33-5] Wafer-Scale Growth and High Density Integration of Suspended Graphene Nanoribbons Array

〇Hiroo Suzuki¹, Kaneko Toshiro¹, Shibuta Yasushi², Ohno Munekazu³, Maekawa Yuki², Kato Toshiaki¹ (1.Tohoku Univ., 2.The Univ. of Tokyo, 3.Hokkaido Univ.)

Keywords:graphene nanoribbon, plasma CVD

In our research group, we developed the site- and alignment-controlled growth method of suspended graphene nanoribbon (GNR) by plasma CVD with Ni nanobar as a catalyst. To improve the growth yield of GNR, understanding the growth mechanism is regarded as a very important subject. Through the comparison of molecular dynamics simulation, phase diagram analysis, and detailed experimental results, the possible growth mechanism of suspended GNR can be established. Based on these knowledges, we have also succeeded in the high yield (> 98%) synthesis of 1,000,000 of GNRs in wafer-scale for the first time.