11:30 AM - 11:45 AM
[16a-A35-10] Fabrication and characterization of optical phased arrays integrated on InP
Keywords:optical phased array, InP, beam steerer
Optical beam steerers, which control propagating directions of laser lights, are much in demand for optical sensing. In particular, semiconductor optical phased arrays are of interest since they can achieve nano-second response, which is impossible for conventional mechanically-driven beam steerers. We fabricated optical phased arrays integrated on InP with InGaAsP/InGaAsP multiple-quantum-well active layer, in consideration of laser integration and high-power operation using amplifiers, and observed response below 0.12μs.