[16a-A35-1~10] 3.13 Semiconductor optical devices

[16a-A35-10] Fabrication and characterization of optical phased arrays integrated on InP

〇Kento Komatsu¹, Masaharu Fukuda¹, Takuo Tanemura¹, Yoshiaki Nakano¹ (1.Univ. of Tokyo)

Keywords:optical phased array, InP, beam steerer

Optical beam steerers, which control propagating directions of laser lights, are much in demand for optical sensing. In particular, semiconductor optical phased arrays are of interest since they can achieve nano-second response, which is impossible for conventional mechanically-driven beam steerers. We fabricated optical phased arrays integrated on InP with InGaAsP/InGaAsP multiple-quantum-well active layer, in consideration of laser integration and high-power operation using amplifiers, and observed response below 0.12μs.