12:00 PM - 12:15 PM
[16a-B1-12] Visualization of Two-Dimensional Electron Gas Layer Formed at GaN/AlGaN Interface by High Sensitivity Electron Holography
Keywords:GaN semiconductor, electron gas, electron holography
To develop next generation GaN devices, it is important to directly evaluate 2-dimensional electron gas or hole gas layers formed around GaN/AlGaN hetero-interfaces. Here, we succeeded in visualizing the 2-dimensional electron gas layer by high sensitivity electron holograpy.