11:45 AM - 12:00 PM
[16a-B1-11] Photoemission Study of Remote Plasma CVD SiO2/GaN Interfaces
Keywords:SiO2/GaN Interface, Remote Plasma CVD
Oral presentation
13 Semiconductors » 13.8 Compound and power electron devices and process technology
Fri. Sep 16, 2016 9:00 AM - 12:30 PM B1 (Exhibition Hall)
Taketomo Sato(Hokkaido Univ.)
11:45 AM - 12:00 PM
Keywords:SiO2/GaN Interface, Remote Plasma CVD