The 77th JSAP Autumn Meeting, 2016

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Poster presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[16a-P5-1~32] 15.4 III-V-group nitride crystals

Fri. Sep 16, 2016 9:30 AM - 11:30 AM P5 (Exhibition Hall)

9:30 AM - 11:30 AM

[16a-P5-28] High crystalline GaN thin films by low O2 GaN sputtering method

〇MASAMI MESUDA1, HIDETO KURAMOCHI1, TOKIO TAKAHASHI2, MITSUAKI SHIMIZU2 (1.Tosoh, 2.AIST)

Keywords:gallium nitride, sputtering