[16p-A24-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [16p-A24-9] Annealing Effect of Si-rich-SiN for High Efficiency Solar Cells Having Nanoimprinted-Texture Structure

〇(D)Seiya Yoshinaga¹, Yasuaki Ishikawa¹, Yunjiang Jiang¹, Yukiharu Uraoka¹ (1.NAIST)

Keywords:Silicon Solar Cell, Nanoimprint Lithography, Si-rich-SiN

Nanoimprinted-texture structure was concerned the increasing of surface reflectance by the increasing the interface reflectance between texture and substrate. To solve the problem, we suggested the insertion of Si-rich-SiN, which is a high refractive index. The surface reflectance of nanoimprinted-texture structure was reduced by insertion of that. However, optical properties of Si-rich-SiN were changed by annealing. In this report, we investigated the effect of annealing temperature of Si-rich-SiN.