4:15 PM - 4:30 PM
[16p-B7-12] Development of Neutral nitriding equipment
Keywords:Neutral nitriding, Plasma nitriding
Presentation information
Oral presentation
8 Plasma Electronics » 8.3 deposition of thin film and surface treatment
[16p-B7-1~13] 8.3 deposition of thin film and surface treatment
Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)
Kazunori Koga(Kyushu Univ.), Keiji Nakamura(Chubu Univ.)